Sputter Coaters

Location: Silver 717
The Electron Microscopy Sciences 150R ES Sputter Coater is a compact turbomolecular-pumped coating system suitable for SEM, TEM and many thin-film applications. This combined system is capable of performing both metal sputtering (usually gold) and carbon coating in one single compartment. The deposition inserts can be swapped in seconds and the intelligent system logic automatically recognizes which insert is in place and displays the appropriate operating settings.

Location: Silver 717
The Cressington 208HR Sputter Coater is designed for Field Emission‐SEM (FE-SEM) imaging where extremely thin, grain‐free, uniform coatings are required to eliminate charging and to improve contrast on low density materials. The target material is iridium to accomplish the above requirements. The HIGH and LOW chamber configuration allows easy adjustment of the working distance from target to sample. The MTM‐20 thickness controller has a resolution of better than 0.1 nm, enabling precise and reproducible thin coatings, especially in the range of 0.5 – 3 nm.