Location: Silver 721A
MERLIN (Carl Zeiss) field emission scanning electron microscope (FESEM): The Merlin FESEM features standard detectors, ‘SE2’ (Everhart-Thornley type) and ‘in lens’ (annular secondary electron). The Merlin also includes an in lens EsB detector with filtering grid, offering energy and angle-selective backscattered electron imaging for highest material contrast. It also includes the multi-segment, Si diode-based CZ BSD back scattered electron detector. X-ray microanalysis is available using the Oxford Instruments EDS with integrated INCA software. In addition to SEM, the Merlin includes STEM detection for high resolution images of TEM samples. The column also offers high resolution imaging at low acceleration voltages and low beam currents.
Technical data: resolution (optimal WD) = 0.8 nm @ 15 kV, 1.4 nm @ 1 kV, 0.6 nm @ 30 kV (STEM mode); magnification = 12 – 2,000,000 x in SE mode; 5-axis motorized stage, –3 to 70 tilt; chamber volume = 330 mm (Ø) x 270 mm (h); local charge compensation device (stainless steel needle injects nitrogen gas into the region of interest); image resolution up to 6144 x 4608 pixels.
The Merlin FESEM was acquired through the support of the MRI program of the National Science Foundation under Award Number DMR-0923251.
Please visit the Electron Microscopy Facility web page for more information.